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  • 01/03/2022 > 

    KEMSTREAM joins SEMCO Technologies, part of ECM Group

  • 01/02/2024 > 

    Meet SEMCO Technologies/KEMSTREAM products specialists at Semicon China 2024

Products
products

KEMSTREAM manufactures innovative and advanced Direct Liquid Injection (DLI) vaporizers and atomizers for CVD, MOCVD, MOVPE, ALD, spray pyrolysis and all gas phase processes and precursors. They deliver pure, accurate, repeatable and stable vapors and aerosols flows.

 

Expertise
expertise

KEMSTREAM offers consulting services. KEMSTREAM can help customers to select CVD and ALD precursors that match their applications and processes. KEMSTREAM can also perform vaporization tests with newly developed precursors to help customers to find the proper injection and vaporization conditions.

Applications
application

Generation of reactive vapors and aerosols for deposition of numerous inorganic materials, organic polymers and hybrid materials as thin films or nanoobjects such as carbon nanotubes by CVD (Chemical Vapor Deposition), spray CVD, spray pyrolysis, ALD (Atomic Layer Deposition) and MLD (Molecular Layer Deposition).

VAPBOX 300

Compact and low cost DLI vaporizer that can operate up to 250°C. It features one high performance and proprietary Kemstream injection head.

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