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Breakthrough Sublimator development
In partnership with the French laboratory CIRIMAT in Toulouse, KEMSTREAM is
developing an innovative and high performances sublimator capable of saturating high flows (up to few tens
of slm) of carrier gas with the vapours of any solid compound by direct and stable vaporization. The
technology is patented and the CNRS granted a licence to KEMSTREAM. The new sublimator being developed
will allow the use of low cost solid compound for all atmospheric or sub-atmospheric CVD and ALD processes.
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