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KEMSTREAM has developed
high performances products liquid and solution vaporizers
implementing a very efficient innovative proprietary
injection/atomization technology that is a real technology
breakthrough. It features a new Injection Head. For further information download
the detailed technology presentation.
This innovative technology is protected by one French patent, one U.S. patent and worldwide counterparts.
Additional patents are being filed. KEMSTREAM’s vaporizers can vaporize both organometallic and organic
compounds used as precursors for the synthesis of organometallic and organic materials as thin films or
nanoparticles by any homogeneous or heterogeneous gas phase process.
See the videos
of the mist / aerosol generated by KEMSTREAM innovative
Injection Head.
Examples of addressed processes:
- CVD (Chemical Vapour Deposition),
- PECVD (Plasma Enhanced CVD),
- MOCVD (Metal Organic CVD),
- ALD (Atomic Layer Deposition),
- PEALD (Plasma Enhanced CVD),
- HWCVD/CatCVD (Hot Wire CVD/Catalytic CVD),
- iCVD (initiated CVD),
- processes used for optical fibers preforms fabrication
namely MCVD (Modified CVD), VAD (Vapour Axial Deposition)
and OVD (Outside Vapour Deposition).
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