New Vapbox 310

KEMSTREAM introduces the Vapbox 310, a new high-performance DLI sprayer that extends the product range.

The Vapbox 310 features an improved internal design, incorporating a new baffle geometry. The result: increased vaporisation efficiency, even with larger liquid or solution flows, while maintaining a compact vaporisation chamber.

It is particularly suitable for:

- CVD on large surfaces
- ALD on 3D structures with a high aspect ratio
- use of low pressure ALD and CVD precursors

Like all models in the Vapbox range, the Vapbox 310 is equipped with the exclusive Kemstream atomiser, which enables highly efficient mixing between the carrier gas and the liquid. A very fine atomisation is acheived, essential for high-performance flash vaporization.