KEMSTREAM manufactures innovative and advanced Direct Liquid Injection (DLI) vaporizers and atomizers for CVD, PECVD, iCVD, MOCVD, MOVPE, ALD, spray pyrolysis and all gas phase processes and precursors. They deliver pure, accurate, repeatable and stable vapors flows and aerosols flows. KEMSTREAM also manufactures accessories for DLI vaporizers and atomizers that are:
- Liquid panels especially designed for feeding DLI vaporizers with air sensitive and/or moisture sensitive precursors, either pure precursors or precursors dissolved in an organic solvent
- Temperature Control Units (TCU)
- Gas panels for feeding DLI vaporizers with carrier gas
Our team of experts offers consulting services in:
- CVD, ALD and Spray Pyrolysis precursors and processes
- Flows Measurement and Control
KEMSTREAM can also do injection/vaporization tests in CVD/ALD processes conditions on a dedicated test bench equipped with a Vapbox and featuring flows, pressures and temperatures monitoring system
KEMSTREAM continuously expands its product offerings to meet customer needs. The complementary chemical and physical approach used by our multi-disciplinary experts’ team allows us to improve the products performances by implementing innovative solutions. The most promising ones are patented.
Management team and co-funders
Herve Guillon is President of KEMSTREAM and leads the company's sales. Dr. Guillon completed a Ph.D in Molecular Chemistry at University of Nice Sophia Antipolis under the supervision of Prof. Liliane Hubert-Pfalzgraf. Dr. Guillon is a specialist in metal-organic chemistry and precursor synthesis (for sol-gel, CVD and ALD processes). Dr. Guillon has also an extensive experience in designing DLI vaporization systems. He is one of the inventors of numerous patents in that field. After his Ph.D he joined Jipelec and then Qualiflow where he was R&D Manager and lead the development of several generations and types of DLI vaporizers.
Samuel Bonnafous is Chief Technology Officer of KEMSTREAM. He is graduate of Ecole Nationale des Arts et Metiers, and also graduate of Louisiana State University, where he received his master’s degree in mechanical engineering with a specialization in fluid dynamics. He worked formerly for Qualiflow, where he was R&D engineer and developed valves (including piezoelectric), gas Mass Flow Controllers and direct liquid injection vaporization systems.
Jean-Manuel Decams completed a Ph.D in Molecular Chemistry at University of Nice Sophia Antipolis under the supervision of Prof. Liliane Hubert-Pfalzgraf. Dr. Decams is a specialist in metal-organic chemistry and precursor synthesis (for sol-gel, CVD and ALD processes). Dr. Decams has also an extensive expertise in designing CVD and ALD systems. He has published extensively and is one of the inventors of numerous patents. After his Ph.D he joined Jipelec and then Qualiflow where he was R&D Engineer and lead the development of several innovative DLI-CVD processes and machines (DLI = Direct Liquid Injection).
18/07/2014 > Kemstream enters into sales collaboration with HORIBA
Kemstream enters into a sales collaboration agreement with HORIBA
07/04/2016 > Kemstream’s 10 year anniversary
Kemstream celebrates its 10th year
07/02/2018 > New Vapbox 300
KEMSTREAM releases a new version of the Vapbox 300, its best seller DLI vaporizer
29/01/2021 > COVID-19 information
KEMSTREAM adapts its operation to COVID-19
03/02/2021 > KEMSTREAM at ALD 2021 conference
KEMSTREAM will exhibit at the ALD/ALE 2021, June 27-30, 2021 in Tampa, Florida, USA