KEMSTREAM manufactures innovative and advanced Direct Liquid Injection (DLI) vaporizers and atomizers for CVD, MOCVD, MOVPE, ALD, spray pyrolysis and all gas phase processes and precursors. They deliver pure, accurate, repeatable and stable vapors and aerosols flows. KEMSTREAM also manufactures accessories for DLI vaporizers and atomizers that are:
- Liquid panels especially designed for feeding DLI vaporizers with air sensitive and/or moisture sensitive precursors
- Temperature controllers
- Gas panels
Our team of experts also offers consulting services in:
- CVD, ALD and Spray Pyrolysis precursors and processes
- Flows Measurement and Control
Kemstream continuously expands its product offerings to meet customer needs. The complementary chemical and physical approach used by our multi-disciplinary experts’ team allows us to improve the products performances by implementing innovative solutions. The most promising ones are patented.
Jean-Manuel Decams Ph.D is President of Kemstream. Dr. Decams completed his Ph.D in Molecular Chemistry at University of Nice Sophia Antipolis under the supervision of Prof. Liliane Hubert-Pfalzgraf. Dr. Decams is a specialist in metal-organic chemistry and precursor synthesis (for sol-gel, CVD and ALD processes). Dr. Decams has also an extensive expertise in designing CVD and ALD systems. He has published extensively and is one of the inventors of numerous patents. After his Ph.D he joined Jipelec and then Qualiflow where he was R&D Engineer and lead the development of several innovative DLI-CVD processes and machines (DLI = Direct Liquid Injection).
Herve Guillon Ph.D leads the company's sales and R&D functions. Dr. Guillon completed his Ph.D in Molecular Chemistry at University of Nice Sophia Antipolis under the supervision of Prof. Liliane Hubert-Pfalzgraf. Dr. Guillon is a specialist in metal-organic chemistry and precursor synthesis (for sol-gel, CVD and ALD processes). Dr. Guillon has also an extensive experience in designing DLI vaporization systems. He is one of the inventors of numerous patents in that field. After his Ph.D he joined Jipelec and then Qualiflow where he was R&D Manager and lead the development of several generations and types of DLI vaporizers.
Samuel Bonnafous is Chief Technology Officer of Kemstream. He is graduate of Ecole Nationale des Arts et Metiers, and also graduate of Louisiana State University, where he received his master’s degree in mechanical engineering with a specialization in fluid dynamics. He worked formerly for Qualiflow, where he was R&D engineer and developed valves (including piezoelectric), gas Mass Flow Controllers and direct liquid injection vaporization systems.
01/08/2016 > New Facility
Since July 2016, KEMSTREAM has moved to its new facility in Montpellier.
31/01/2017 > KEMSTREAM at 2017 E-MRS Spring Meeting in Strasbourg
KEMSTREAM will exhibit at the 2017 E-MRS Spring Meeting, May 22 to 24, in Strasbourg, France
01/03/2017 > KEMSTREAM at Joint EUROCVD 21 - Baltic ALD 15
KEMSTREAM will exhibit at the Joint EUROCVD 21 - Baltic ALD 15, June 11 to 14 2017, in Sweden
03/03/2017 > KEMSTREAM at ALD 2017 conference
KEMSTREAM will exhibit at the ALD 2017 - ALE 2017, July 15 to 18 2017 in Denver