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KEMSTREAM at ALD 2019 conference


From July 22 to July 24 2019, KEMSTREAM will exhibit at the AVS 19th International Conference on Atomic Layer Deposition (ALD 2019) featuring the 6th International Atomic Layer Etching Workshop (ALE 2019) in Bellevue, WA, USA. It will be a three-day meeting dedicated to the science and technology of atomic layer controlled deposition of thin films and now topics related to atomic layer etching. The conference will take place Sunday, July 21-Wednesday, July 24, 2019, at the Hyatt Regency Bellevue in Bellevue, Washington (East Seattle). KEMSTREAM will present its latest development and advancement in the field of DLI (Direct Liquid Injection) vaporizers designed for demanding ALD and CVD precursors and processes. Please stop by our booth # 606 where you can meet our ALD and ALE expert and discuss your need for vaporization of ALD precursors and ALE reactants.

KEMSTREAM at Joint EUROCVD 22 - Baltic ALD 16


KEMSTREAM will exhibit at the Joint EUROCVD 22 - Baltic ALD 16 conference from June 24 to 28 2019, in Luxembourg. The conference will offer a high quality scientific program with invited and contributed lectures in key development areas based on chemical processing from the gas phase. KEMSTREAM will present its latest development and advancement in the field of DLI (Direct Liquid Injection) vaporizers designed for generating reactive gas phases from pure liquids or solutions (liquid and solid compounds dissolved in an organic solvent). KEMSTREAM Vapbox series DLI vaporizers are especially efficient for low vapor pressure and thermally sensitive CVD and ALD precursors. KEMSTREAM’s Vapbox DLI vaporizers can operate at atmospheric pressure or under vacuum and can address a very wide range of ALD and CVD precursors and processes including CVD, MOCVD, PECVD, iCVD, CCVD, ALD, PEALD, MLD and MVD.

More details about the conference and registration on

KEMSTREAM at 2019 E-MRS Spring Meeting in Nice


KEMSTREAM will exhibit at the 2019 E-MRS Spring Meeting from May 27 to 31 in Nice, France (Congress & Exhibition Centre Acropolis). The 2019 E-MRS Spring Meeting is organized in conjunction with the International Conference on Advanced Materials (ICAM) of the International Union of Materials Research Societies (IUMRS). Please stop by our booth # 45 where you can meet our Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) expert and discuss your need for vaporization of CVD and ALD precursors or for injection of nanoparticles suspensions. KEMSTREAM will also exhibit one of its Vapbox DLI (Direct Liquid Injection) vaporizer

New Vapbox 300


KEMSTREAM introduces on the market a new version of the Vapbox 300, its best seller DLI vaporizer. Compared to the former version of the Vapbox 300, this new version features an improved internal design with new baffle geometry to increase vaporisation efficiency. The vaporization chamber of the new Vapbox 300 version is also able to operate up to 250°C for only 220°C for the former version. These modifications improve the global perfomances of the DLI vaporizer and open new possibilities and markets for the Vapbox 300.

New Facility


Since end of July 2016, KEMSTREAM has moved to a new building which address is: 139 rue des Walkyries, 34000 Montpellier, France. Our phone number (+33.467.200.410) and our fax number (+33.467.200.411) are unchanged. Our new building will allow our team to work in optimized conditions for a better customers satisfaction.

Kemstream’s 10 year anniversary


Established in April 2006, Kemstream is pleased to celebrate its 10th year. On this occasion, Kemstream would like to thank all its valuable and faithful customers for their business. We hope to continue working with you in the future, to help you reach your goals. We would like to take this opportunity to highlight the fact that the satisfaction of our clients with our products will always be our highest priority.

Kemstream enters into sales collaboration with HORIBA


July 18th 2014 Montpellier, France, Advanced Direct Liquid Injection manufacturer Kemstream, enters into a sales collaboration agreement with the market leader HORIBA.

“As the recognized leader in flow and vapor control to the semiconductor industry HORIBASTEC is working together with its customers to develop products to deliver next generation precursors to the process chamber. We are very happy now to also bring Kemstream’s extensive expertise in advanced direct liquid injection technology to our customers”, comments Stuart Knight, HORIBA’s Europe VP. “HORIBA’s vaporizer product range will be complemented by Kemstream’s direct liquid injection products which will help us meet the unique demands of next generation solid precursors”.

HORIBASTEC, the world leader for semiconductor manufacturing industries, offers customers a full line of liquid flow control and liquid source vaporisation and control systems. A variety of vaporiser technologies are available from HORIBASTEC for different precursors. These include baking, direct injection and mixing to guarantee efficient and stable delivery of vapor to the point of use. Auto refill systems complete the line-up, offering uninterrupted, safe and reliable delivery of liquid precursors, increasing uptime and reducing operator handling and risk of process contamination.

Kemstream’s President, Jean Manuel Decams states, “we are very happy to collaborate with HORIBA. By taking Kemstream’s advanced direct liquid injection products and expertise and marrying with HORIBA’s experience and strong global network we feel that the wider market will have better access to Kemstream’s cutting edge direct liquid injection technology”.

Kemstream’s latest innovation is the Vapbox series, a wide range of high-performing direct liquid injection (DLI) vaporizers. Vapbox DLI vaporizers feature a proprietary injection-atomization technology and an optimized vaporization chamber design which allow them to perform reliable, accurate and repeatable vaporization of liquid and dissolved solid compounds and precursors. The Vapbox range generates pure vapors for every application that requires a reactive gas phase that has to be obtained from liquid or solid compounds and precursors. These applications include CVD (Chemical Vapor Deposition) and ALD (Atomic Layer Deposition) processes. 

About KEMSTREAM: KEMSTREAM develops and manufactures innovative advanced Direct Liquid Injection (DLI) vaporizers for demanding CVD, MOCVD, and ALD processes and precursors. KEMSTREAM products address research and development, pilot and production applications for diverse markets including semiconductor, glass and PV industries.

About HORIBA: HORIBA provides an extensive array of analytical instruments and systems for applications ranging from automotive R&D, process and environmental monitoring, in-vitro medical diagnostics, semiconductor manufacturing and metrology, to a broad range of scientific R&D and QC measurements. HORIBASTEC is a wholly owned subsidiary of HORIBA famous for mass flow controllers, compact direct injection devices and automatic refill systems for the semiconductor, photovoltaic and LED industries.

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In the picture: from left to right: Takuya Ito; HORIBASTEC Sales, Shigeji Ao; HORIBA Senior Applications Engineer, Stuart Knight; HORIBA European Segment VP, Jean Manuel Decams; Kemstream President, Herve Guillon; Kemstream Sales Manager, Samuel Bonnafous; Kemstream Engineering Director