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Thanks to its extensive experience in molecular chemistry and its wide knowledge of CVD and ALD precursors and processes, KEMSTREAM team offers a consultancy service for:
  • The choice of CVD and ALD precursors
  • The safe handling of air sensitive and pyrophoric CVD and ALD precursors
  • An optimal implementation of these precursors in CVD and ALD processes and machines

Test capabilities

KEMSTREAM has also an application laboratory with a vaporization test bench that can be equipped with all Vapbox vaporizers models. It allows performing vaporization tests in a wide range of vaporization conditions:
  • To demonstrate the efficiency of Vapbox DLI vaporizers
  • To find the proper vaporization conditions for new precursors and for precursors which vapor pressure is not well known
  • To study the influence of different process parameters (carrier gas flow, temperature,...) on the efficiency of the vaporization process


Technical support for integration

KEMSTREAM DLI vaporizers have been already installed successfully on numerous CVD and ALD machines giving our team of experts an extensive experience in that field. KEMSTREAM can thus provide advices and guideline for integration of its DLI vaporizers on any CVD and ALD machine.
  • 18/07/2014 > Kemstream enters into sales collaboration with HORIBA

    Kemstream enters into a sales collaboration agreement with HORIBA

  • 07/02/2018 > New Vapbox 300

    KEMSTREAM releases a new version of the Vapbox 300, its best seller DLI vaporizer

  • 11/03/2022 > KEMSTREAM at 22nd International Conference on ALD 2022

    KEMSTREAM will exhibit at the ALD/ALE 2022, June 26-29, 2022 in Ghent, Belgium

  • 01/03/2022 > KEMSTREAM joins SEMCO Technologies

    KEMSTREAM joins SEMCO Technologies, part of ECM Group

  • 01/03/2023 > SEMCO Technologies/KEMSTREAM at Joint EUROCVD 23 - Baltic ALD 17

    SEMCO Technologies/KEMSTREAM will exhibit at the EUROCVD 23 - Baltic ALD 17, in Leuven

  • 31/03/2023 > SEMCO Technologies/KEMSTREAM at the 23nd International Conference on ALD 2023

    SEMCO Technologies/KEMSTREAM will exhibit at the ALD/ALE 2023, July 23-26, Bellevue, WA, USA

  • 01/09/2023 > SEMCO Technologies/KEMSTREAM at the 244th ECS Meeting

    SEMCO Technologies/KEMSTREAM exhibit at the 244th ECS Meeting, Oct 9-11, Gothenburg, Sweden

  • 01/02/2024 > SEMCO Technologies/KEMSTREAM at Semicon China 2024

    Meet SEMCO Technologies/KEMSTREAM products specialists at Semicon China 2024

  • 24/04/2024 > SEMCO Technologies at the 24th International Conference on ALD/ALE

    SEMCO Technologies will exhibit at the ALD/ALE 2024, August 4-7, Helsinki, Finland

  • 31/05/2024 > Company change

    Creation of ECM COMPONENTS