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ACCESSORIES

Kemstream has developed a complete range of accessories for its direct liquid injection vaporizers Vapbox and its direct liquid injection atomizers Atokit. Those accessories are:

  • Carrier gas panels for feeding Vapbox DLI vaporizers and Atokit DLI atomizers with carrier gas. They feature one carrier gas MFM (Mass Flow Meter) per injection head addressed. They are made with high quality components compatible with Ultra High Purity (UHP) gas handling.
  • Liquid flow controlling kit featuring one LFM (Liquid Flow Meter). It is made with high quality components compatible with Ultra High Purity (UHP) liquid handling.
  • Liquid panels for feeding Vapbox DLI vaporizers and Atokit DLI atomizers with liquid and solution. The architecture of the panels allows use and safe handling of air sensitive and pyrophoric compounds and precursors. In case of solid compounds and precursors or low volatility liquids, the liquid panel features a solvent tank for rinsing the injection line. The liquid panels are made with high quality components compatible with Ultra High Purity (UHP) liquid handling.
  • Mutizone Temperature Control Unit (TCU) for controlling the operating temperature of the vaporization chamber of Vapbox DLI vaporizers and Atokit CF100

Temperature Control Units

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Temperature Control Units (TCU) for Vapbox and Atokit that can handle temperature regulation of 2 to 6 heating zones.



Liquid Panels

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Liquid Panels for Vapbox and Atokits that can handle 1 or 2 precursors and 1 solvent (for cleaning operation).