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Breakthrough Sublimator development

KEMSTREAM is developing an innovative and high performances sublimator capable of saturating high flows (up to few tens of slm) of carrier gas with the vapours of any solid compound by direct and stable vaporization. The new sublimator being developed will allow the use of low cost solid compound for all atmospheric or sub-atmospheric CVD and ALD processes. It will also be able to work under vacuum.

  • 01/08/2016 > New Facility

    Since July 2016, KEMSTREAM has moved to its new facility in Montpellier.

  • 31/01/2017 > KEMSTREAM at 2017 E-MRS Spring Meeting in Strasbourg

    KEMSTREAM will exhibit at the 2017 E-MRS Spring Meeting, May 22 to 24, in Strasbourg, France

  • 01/03/2017 > KEMSTREAM at Joint EUROCVD 21 - Baltic ALD 15

    KEMSTREAM will exhibit at the Joint EUROCVD 21 - Baltic ALD 15, June 11 to 14 2017, in Sweden

  • 03/03/2017 > KEMSTREAM at ALD 2017 conference

    KEMSTREAM will exhibit at the ALD 2017 - ALE 2017, July 15 to 18 2017 in Denver