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Breakthrough Sublimator development

KEMSTREAM is developing an innovative and high performances sublimator capable of saturating high flows (up to few tens of slm) of carrier gas with the vapours of any solid compound by direct and stable vaporization. The new sublimator being developed will allow the use of low cost solid compound for all atmospheric or sub-atmospheric CVD and ALD processes. It will also be able to work under vacuum.

  • 18/07/2014 > Kemstream enters into sales collaboration with HORIBA

    Kemstream enters into a sales collaboration agreement with HORIBA

  • 07/02/2018 > New Vapbox 300

    KEMSTREAM releases a new version of the Vapbox 300, its best seller DLI vaporizer

  • 11/03/2022 > KEMSTREAM at 22nd International Conference on ALD 2022

    KEMSTREAM will exhibit at the ALD/ALE 2022, June 26-29, 2022 in Ghent, Belgium

  • 01/03/2022 > KEMSTREAM joins SEMCO Technologies

    KEMSTREAM joins SEMCO Technologies, part of ECM Group

  • 01/03/2023 > SEMCO Technologies/KEMSTREAM at Joint EUROCVD 23 - Baltic ALD 17

    SEMCO Technologies/KEMSTREAM will exhibit at the EUROCVD 23 - Baltic ALD 17, in Leuven

  • 31/03/2023 > SEMCO Technologies/KEMSTREAM at the 23nd International Conference on ALD 2023

    SEMCO Technologies/KEMSTREAM will exhibit at the ALD/ALE 2023, July 23-26, Bellevue, WA, USA

  • 01/09/2023 > SEMCO Technologies/KEMSTREAM at the 244th ECS Meeting

    SEMCO Technologies/KEMSTREAM exhibit at the 244th ECS Meeting, Oct 9-11, Gothenburg, Sweden

  • 01/02/2024 > SEMCO Technologies/KEMSTREAM at Semicon China 2024

    Meet SEMCO Technologies/KEMSTREAM products specialists at Semicon China 2024

  • 24/04/2024 > SEMCO Technologies at the 24th International Conference on ALD/ALE

    SEMCO Technologies will exhibit at the ALD/ALE 2024, August 4-7, Helsinki, Finland

  • 31/05/2024 > Company change

    Creation of ECM COMPONENTS