VAPBOX 500
Vapbox 500 DLI vaporizer is easy to integrate on any CVD and ALD machine. It can vaporize at up to 250°C one liquid or one solution under vacuum or at atmospheric pressure.
VAPBOX 500 Technical specifications
General
- One injection head
- Liquid inlet: 1/8” compression type fitting
- Carrier gas inlet: 1/4" female VCR fitting
- Vapor outlet: 1/2" male VCR fitting
- Other fittings are available upon request
Heating
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One heating zone, up to 250°C, 1000 W (230 VAC or 115 VAC)
- 2 K type thermocouples: (1 for heating control, 1 for alarm purpose)
- Current needed: 1.9 A (230 VAC) ; 3.8 A (115 VAC)
Accessories:
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Liquid panel including a precursor tank and a solvent tank (or only a precursor tank)
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Liquid flow controlling kit including a Liquid Flow Meter (LFM)
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Carrier gas panel including a carrier gas Mass Flow Meter (MFM)
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TCU (Temperature Control Unit): 19” rackable 4U box
