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Vapbox 500 DLI vaporizer is easy to integrate on any CVD and ALD machine. It can vaporize at up to 250°C one liquid or one solution under vacuum or at atmospheric pressure.

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VAPBOX 500 Technical specifications
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  • One injection head
  • Liquid inlet: 1/8” compression type fitting
  • Carrier gas inlet: 1/4" female VCR fitting
  • Vapor outlet: 1/2" male VCR fitting
  • Other fittings are available upon request


  • One heating zone, up to 250°C, 1000 W (230 VAC or 115 VAC)
  • 2 K type thermocouples: (1 for heating control, 1 for alarm purpose)
  • Current needed: 1.9 A (230 VAC) ; 3.8 A (115 VAC)


  • Liquid panel including a precursor tank and a solvent tank (or only a precursor tank)
  • Liquid flow controlling kit including a Liquid Flow Meter (LFM)
  • Carrier gas panel including a carrier gas Mass Flow Meter (MFM)
  • TCU (Temperature Control Unit): 19” rackable 4U box