Designer and manufacturer of annealing systems for labs and R&D departments.

Innovative, low cost, compact, non contact, flash DLI Vaporizer for solid and liquid precursors used in CVD, ALD and all gas phase processes with one liquid inlet.
Applications: Research & Development and Pilot Production.
Processes addressed: MOCVD, ALD, PECVD, all CVD and gas phase processes.
It can efficiently vaporize low vapour pressure solids solved in organic solvents and few tens of g/min of liquids such as TEOS. >> Download the Vapbox 500 datasheet (PDF)

KEMSTREAM offers to customers its innovative injection/atomization technology for Pyrosol/Spray Pyrolysis applications and for direct installation on their vaporization or on their CVD/ALD chamber. For these applications, the Injection Head is delivered connected on a stainless steel flange as a stand alone device (without the vaporizer). A 19" rackable 2U stand alone ICU (Injector Control Unit) is provided with the system. It includes the Injector Electronic Control Board.
Applications: Pyrosol and Spray Pyrolysis processes, vaporization directly in the CVD/ALD chamber. >> Download the Atokit datasheet (PDF)

For handling of air and moisture sensitive precursors, KEMSTREAM can design and manufacture liquid panels that match your specific requirements.